The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Apr. 08, 2013
Novellus Systems, Inc., San Jose, CA (US);
Mohamed Sabri, Beaverton, OR (US);
Edward Augustyniak, Tualatin, OR (US);
Douglas L. Keil, West Linn, OR (US);
Ramkishan Rao Lingampalli, Dublin, CA (US);
Karl Leeser, Lake Oswego, OR (US);
Cody Barnett, Portland, OR (US);
NOVELLUS SYSTEMS, INC., San Jose, CA (US);
Abstract
A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent to a first surface of the back plate and includes a gas diffusion surface. An electrode is arranged in one of the back plate and the face plate and is connected to one or more conductors. A gas plenum is defined between the back plate and the face plate and is in fluid communication with the gas channel. The back plate and the face plate are made of a non-metallic material.