The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 1998
Filed:
Nov. 02, 1995
Applicant:
Inventor:
Ramkishan Rao Lingampalli, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H / ;
U.S. Cl.
CPC ...
216 68 ; 156345 ; 1187 / ; 438729 ; 20419212 ; 20429808 ; 20429834 ;
Abstract
A high temperature, oxidation resistant coating is provided for an RF antenna used in semiconductor processing. In a preferred embodiment, the coating is made of nickel to protect the antenna against oxidation at high temperatures.