Company Filing History:
Years Active: 2005-2008
Title: The Innovative Contributions of R Mark Johnson in Extreme Ultraviolet Light Technology
Introduction
R Mark Johnson, based in Ramona, CA, is an acclaimed inventor known for his remarkable contributions to the field of photonics. With a portfolio of two patents, he has made significant strides in developing advanced technologies that enhance the capabilities of high-energy photon sources.
Latest Patents
Among his notable inventions is a state-of-the-art extreme ultraviolet light source. This innovation provides a reliable, high-repetition rate, production line compatible high-energy photon source. The invention features a vacuum chamber that produces a very hot plasma containing an active material. This active material is an atomic element with an emission line within a desired extreme ultraviolet (EUV) range. The design includes a pulse power source made up of a charging capacitor and a magnetic compression circuit, which contains a pulse transformer. This setup generates electrical pulses that provide sufficient energy and potential to produce EUV light at an intermediate focus at rates exceeding 5 Watts. Notably, in preferred embodiments developed by Johnson and his team, the EUV light energy at the intermediate focus can reach 45 Watts, extendable up to 105.8 Watts.
Career Highlights
R Mark Johnson currently applies his expertise at Cymer, Inc., a recognized leader in the development of photonic solutions. Throughout his career, his passion for innovation has propelled him to explore new frontiers in the field, leading to advancements that significantly impact various applications and industries.
Collaborations
Johnson collaborates with talented professionals, including coworkers Stephan T Melnychuk and William N Partlo, who share his vision of pushing the boundaries of technology. Their collective efforts have contributed to the success of their projects and have further established Johnson's reputation as a leading inventor in his field.
Conclusion
R Mark Johnson's work in the development of extreme ultraviolet light sources underscores his commitment to innovation and excellence in the field of photonics. His patents not only reflect his ingenuity but also pave the way for advancements in high-energy photon technologies, making significant contributions to various scientific and industrial applications.