Location History:
- Beijing, CN (2014)
- Shanghai, CN (2014 - 2017)
Company Filing History:
4 out of 1,724 
1 out of 934 Years Active: 2014-2017
Title: Pulei Zhu: Innovator in Semiconductor Manufacturing
Introduction
Pulei Zhu is a prominent inventor based in Shanghai, China, known for his contributions to semiconductor manufacturing. With a total of 5 patents, he has made significant advancements in the field, particularly in the area of chemical mechanical polishing processes.
Latest Patents
One of his latest patents is titled "Preventing over-polishing of poly gate in metal-gate CMP." This method for manufacturing a semiconductor device involves providing a substrate that contains a front-end device with a first gate in a first-type transistor region and a second gate in a second-type transistor region. The process includes forming an interlayer dielectric layer on the semiconductor substrate and planarizing it to expose the surfaces of both gates. Additionally, a hard mask layer is formed on the second gate, and the first gate is removed using this mask to create a trench. Sequentially, a work function metal layer and a metal gate layer are formed in the trench, followed by the removal of excess material to create a metal gate.
Another significant patent is the "Semiconductor device manufacturing method and related semiconductor wafer." This method outlines a process for wafer processing during semiconductor device manufacturing. It includes using a first slurry set for a chemical mechanical polishing process on the wafer, which contains multiple metal gate structures. A second slurry set is then used, with a lower concentration of slurry material, followed by a cleaning process and the application of an anti-reflective coating on the wafer.
Career Highlights
Pulei Zhu has worked with notable companies in the semiconductor industry, including Semiconductor Manufacturing International (Shanghai) Corporation and Semiconductor Manufacturing International (Beijing) Corporation. His experience in these organizations has allowed him to refine his skills and contribute to innovative solutions in semiconductor technology.
Collaborations
Throughout his career, Pulei Zhu has collaborated with talented individuals such as Li Jiang and Mingqi Li, who have contributed to his projects and innovations in the semiconductor field.
Conclusion
Pulei Zhu's work in semiconductor manufacturing has led to important advancements that enhance the efficiency and effectiveness of semiconductor devices. His patents reflect a deep understanding of the complexities involved in the manufacturing process, making him a valuable contributor to the industry.