The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Dec. 08, 2011
Applicants:
LI Jiang, Beijing, CN;
Mingqi LI, Beijing, CN;
Pulei Zhu, Beijing, CN;
Assignee:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01); H01L 21/02 (2006.01); H01L 29/49 (2006.01); H01L 21/321 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 29/495 (2013.01); H01L 21/02244 (2013.01); H01L 21/3212 (2013.01); H01L 21/28079 (2013.01); H01L 21/02074 (2013.01);
Abstract
The present invention discloses a method for fabricating semiconductor devices. After removing excessive aluminum to form aluminum gates through a chemical mechanical planarization (CMP) process, the exposed surfaces of the aluminum gates are oxidized with HOsolution to form a film of alumina, and the semiconductor device is cleaned.