Semiconductor Manufacturing International (shanghai) Corporation

Semiconductor Manufacturing International (beijing) Corporation

Pulei Zhu

Li Jiang

Mingqi Li

Xiantao Li

Jun Yang

A method for manufacturing a semiconductor device includes providing a substrate containing a front-end device that includes a first gate in a first-type transistor region and a second gate in a second-type transistor region, forming an interlayer dielectric layer on the semiconductor substrate, and planarizing the interlayer dielectric layer to expose the surface of the first and second gates. The method also includes forming a hard mask layer on the second gate, removing the first gate using the hard mask layer as a mask to form a trench, forming sequentially a work function metal layer and a metal gate layer in the trench, and removing a portion of the first work function metal layer and a portion of the metal gate layer that are higher than the interlayer dielectric layer to form a metal gate.

Preventing over-polishing of poly gate in metal-gate CMP

A method for processing a wafer (in a process of manufacturing semiconductor devices) may include the following steps: using a first slurry set to perform a first chemical mechanical polishing process on the wafer, wherein the wafer includes a plurality of metal gate structures; using a second slurry set to perform a second chemical mechanical polishing process on the wafer, wherein a concentration of a slurry material in the second slurry set is less than a concentration of the slurry material in the first slurry set; performing a cleaning process on the wafer; and providing an anti-reflective coating on the wafer.

Semiconductor device manufacturing method and related semiconductor wafer

A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device uses an aluminum alloy, rather than aluminum, for a metal gate. Therefore, the surface of the high-k metal gate after the CMP is aluminum alloy rather than pure aluminum, which can greatly reduce defects, such as corrosion, pits and damage, in the metal gate and improve reliability of the semiconductor device.

Semiconductor device with an aluminum alloy gate

The present invention discloses a method for fabricating semiconductor devices. After removing excessive aluminum to form aluminum gates through a chemical mechanical planarization (CMP) process, the exposed surfaces of the aluminum gates are oxidized with HOsolution to form a film of alumina, and the semiconductor device is cleaned.

Growing community of inventors

Shanghai, China

Pulei Zhu