Santa Clara, CA, United States of America

Prithu Sharma


Average Co-Inventor Count = 6.9

ph-index = 2

Forward Citations = 41(Granted Patents)


Company Filing History:


Years Active: 2015-2019

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5 patents (USPTO):Explore Patents

Title: The Innovative Mind of Prithu Sharma: A Look at His Contributions to Metal Integration

Introduction: Prithu Sharma, an accomplished inventor based in Santa Clara, California, has made significant strides in the field of metal integration. With a total of five patents to his name, his work has had a substantial impact on the technology industry. As a dedicated professional at Lam Research Corporation, he continually pushes the boundaries of innovation.

Latest Patents: Among Prithu's latest patents are groundbreaking methods and techniques for fabricating metal interconnects, lines, or vias through subtractive etching and liner deposition methods. His innovative approach involves depositing a blanket copper layer and subsequently removing specific regions to create intricate patterns. The process also includes treating the patterned metal and depositing a copper-dielectric interface material, which adheres only to the patterned copper. Additionally, he implements a dielectric barrier layer and a dielectric bulk layer on the substrate, showcasing his expertise in enhancing metal integration processes.

Career Highlights: Prithu's role at Lam Research Corporation has been pivotal in advancing the company's capabilities in metal integration. His contributions to the development of new techniques have been influential in improving the efficiency and effectiveness of metal interconnect fabrication. Over the years, he has demonstrated a commitment to innovation, which is evident in his successful patent applications.

Collaborations: Throughout his career, Prithu has collaborated with talented professionals such as Meihua Shen and Thorsten B Lill. Together, they have tackled complex challenges in the realm of metal integration, fostering an environment of creativity and teamwork that drives their projects forward.

Conclusion: Prithu Sharma's innovative spirit and technical expertise have positioned him as a notable figure in the field of metal integration. With five patents and a strong commitment to his work at Lam Research Corporation, he continues to influence the future of technology through inspiring innovations. As he advances his career, the industry eagerly anticipates his next groundbreaking contributions.

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