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Philippe Coronel

USPTO Granted Patents = 8

Average Co-Inventor Count = 2.9

ph-index = 6

Forward Citations = 570(Granted Patents)

Company Filing History:

8 out of 164,173

International Business Machines Corporation

Years Active: 1997-2002

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6417072 - Method of forming STI oxide regions and alignment marks in a semiconductor structure with one masking step (2002-07-09),

2. 6363294 - Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision (2002-03-26),

3. 6342452 - Method of fabricating a Si3N4/polycide structure using a dielectric sacrificial layer as a mask (2002-01-29),

4. 6297089 - Method of forming buried straps in DRAMs (2001-10-02),

5. 6281068 - Method for buried plate formation in deep trench capacitors (2001-08-28),

6. 5874345 - Method for planarizing TEOS SiO.sub.2 filled shallow isolation trenches (1999-02-23),

7. 5807761 - Method for real-time in-situ monitoring of a trench formation process (1998-09-15),

8. 5658418 - Apparatus for monitoring the dry etching of a dielectric film to a given (1997-08-19),

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