Company Filing History:
Years Active: 2004
Title: Petra Alén: Innovator in Metal Thin Film Technology
Introduction
Petra Alén is a prominent inventor based in Helsinki, Finland. She has made significant contributions to the field of materials science, particularly in the development of processes for producing metal thin films. With a total of 2 patents, her work has implications for various high-tech applications.
Latest Patents
One of her latest patents is titled "Process for producing metal thin films by ALD." This invention focuses on creating electrically conductive noble metal thin films on substrates using atomic layer deposition (ALD). The process involves pulsing a vaporized precursor of a noble metal into a reaction chamber, where it interacts with the substrate surface. This method allows for the deposition of high-quality metal thin films, particularly in structures with high aspect ratio vias and trenches.
Another notable patent is "Method for preparing metal nitride thin films." This invention describes methods for producing metal nitride thin layers with low resistivity through atomic layer deposition processes. The use of nitrogen source materials with superior reducing properties enhances the efficiency of the process. The resulting nitride thin layers are particularly suitable for use as diffusion barrier layers in integrated circuits.
Career Highlights
Petra Alén is currently employed at ASM International N.V., a company known for its advanced semiconductor manufacturing equipment. Her work at ASM has positioned her as a key player in the field of atomic layer deposition technology.
Collaborations
Throughout her career, Petra has collaborated with notable colleagues, including Markku Leskelä and Mikko Ritala. These collaborations have further enriched her research and development efforts in the field of materials science.
Conclusion
Petra Alén's innovative work in metal thin film technology showcases her expertise and commitment to advancing the field. Her patents reflect significant advancements that have the potential to impact various high-tech industries.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.