Pei-Wen Li

Title: Pei-Wen Li: Innovator in Semiconductor Technology

Introduction

Pei-Wen Li is a notable inventor based in Kao-Hsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on innovative methods that enhance the manufacturing processes in the semiconductor industry.

Latest Patents

One of Pei-Wen Li's latest patents is a method for removing etch-induced polymer film and damaged silicon layers from a silicon surface. This invention discloses a technique for simultaneously eliminating unwanted materials by exposing the silicon surface to a cleaning solution containing amine or ethanolamine. The method is effective in cleaning away damaged silicon layers with a thickness between about 20 Å and about 60 Å within a time frame of approximately 2 to 20 minutes. A preferred embodiment of this method utilizes a water solution of ethanolamine and gallic acid.

Another significant patent is a method of manufacturing crown shape capacitors for use in DRAM semiconductor memory. This method involves several steps, including forming a first polysilicon layer, patterning a photoresist, etching the polysilicon layer, and using oxygen plasma to strip the photoresist. The process culminates in the formation of a crown shape structure, followed by the deposition of a dielectric layer and a second polysilicon layer.

Career Highlights

Pei-Wen Li is currently employed at Vanguard International Semiconductor Corporation, where he applies his expertise in semiconductor manufacturing. His innovative approaches have contributed to advancements in the efficiency and effectiveness of semiconductor devices.

Collaborations

Pei-Wen Li has collaborated with notable coworkers, including Meng-Jaw Cherng and Tzu-Shih Yen, who is a woman. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies in the semiconductor field.

Conclusion

Pei-Wen Li's contributions to semiconductor technology through his patents and work at Vanguard International Semiconductor Corporation highlight his role as an influential inventor. His innovative methods continue to shape the future of semiconductor manufacturing.