Location History:
- Taipei, TW (2023)
- Hsinchu, TW (2023)
Company Filing History:
Years Active: 2023-2025
Title: Pei-Sheng Tang: Innovator in Semiconductor Technology
Introduction
Pei-Sheng Tang is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative work focuses on methods that enhance the manufacturing processes of memory devices and the evaluation of thin film stress.
Latest Patents
One of his latest patents is titled "Method for evaluating non-uniform stress." This method involves evaluating thin film non-uniform stress using high order wafer warpage. The process includes measuring net wafer warpage across a wafer area due to thin film deposition, fitting a two-dimensional low-order polynomial to the wafer warpage measurements, and subtracting the low-order polynomial from the net wafer warpage across the wafer area. Another notable patent is "Memory device and manufacturing method thereof." This patent outlines a method for manufacturing a memory device that includes forming a dielectric layer over a wafer, which has a device region and a peripheral region adjacent to it. The process involves forming a bottom via opening in the dielectric layer, creating a trench over the peripheral region, and forming a bottom electrode via and a bottom electrode layer.
Career Highlights
Pei-Sheng Tang is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. His work at this leading semiconductor manufacturer has allowed him to apply his innovative ideas in practical applications, contributing to advancements in the industry.
Collaborations
Throughout his career, Pei-Sheng has collaborated with notable colleagues, including Wei-De Ho and Han-Wei Wu. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies.
Conclusion
Pei-Sheng Tang's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative methods continue to shape the future of memory device manufacturing and stress evaluation in thin films.