Company Filing History:
Years Active: 2003-2006
Title: The Innovative Mind of Paul Proctor in Singapore
Introduction
Paul Proctor is a prominent inventor based in Singapore, renowned for his contributions to the field of semiconductor technology. With a total of eight patents to his name, Proctor's work significantly impacts modern electronics, particularly in the areas of capacitors and wafer polishing techniques.
Latest Patents
Among his latest innovations, Proctor developed high-k artificial lattices for capacitor applications, specifically designed for copper or aluminum back-end-of-line (BEOL) processes. This advanced fabrication of high dielectric constant metal-insulator-metal (MIM) capacitors meets stringent requirements for both RF and analog circuit applications. Notably, these capacitors utilize copper electrodes, manufactured through a dual damascene process, allowing for precise control over the dielectric constant by adjusting the superlattice layer configurations. With enhancements in dielectric constants reaching near 900 for films only 250 Angstroms thick, Proctor utilizes advanced layer growth techniques such as molecular beam epitaxy (MBE) and atomic layer chemical vapor deposition (ALCVD).
Another significant patent from Proctor includes a chemical-mechanical polishing apparatus, designed for planarizing wafers and films more efficiently. This invention features a substrate chuck to hold the wafer, a rotating polishing head, and a unique polishing solution supply system without the need for a polishing pad. This design showcases Proctor's innovative thinking and commitment to improving semiconductor manufacturing processes.
Career Highlights
Paul Proctor is affiliated with Chartered Semiconductor Manufacturing Ltd, where he applies his expertise to drive technological advancements in the semiconductor sector. His role at this esteemed company underscores his dedication to innovation and excellence in manufacturing processes.
Collaborations
Throughout his career, Proctor has collaborated with notable colleagues, including Subramanian Balakumar and Chew Hoe Ang. These partnerships have facilitated the exchange of ideas and technological solutions, enhancing the effectiveness of their collective contributions to semiconductor technology.
Conclusion
Paul Proctor's inventive spirit and technical prowess continue to make significant strides in the field of electronics. With his impressive portfolio of patents and collaborative efforts, he remains a vital force behind the advancement of semiconductor technologies in Singapore and beyond.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.