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Marblehead, MA, United States of America

Paul Moroz

USPTO Granted Patents = 11 (Patent Applications = 1)

Average Co-Inventor Count = 1.7

ph-index = 6

Forward Citations = 119(Granted Patents)

Location History:

Phoenix, AZ (US) (2005)
Marblehead, MA (US) (2004 - 2011)

Company Filing History:

11 out of 10,346

Tokyo Electron Limited

Years Active: 2004-2011

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7998307 - Electron beam enhanced surface wave plasma source (2011-08-16),

2. 7938081 - Radial line slot antenna having a conductive layer (2011-05-10),

3. 7199327 - Method and system for arc suppression in a plasma processing system (2007-04-03),

4. 7186313 - Plasma chamber wall segment temperature control (2007-03-06),

5. 7141763 - Method and apparatus for rapid temperature change and control (2006-11-28),

6. 7109122 - Method and apparatus for reducing substrate charging damage (2006-09-19),

7. 7073383 - Apparatus and method for determining clamping status of semiconductor wafer (2006-07-11),

8. 6992892 - Method and apparatus for efficient temperature control using a contact volume (2006-01-31),

9. 6887341 - Plasma processing apparatus for spatial control of dissociation and ionization (2005-05-03),

10. 6868800 - Branching RF antennas and plasma processing apparatus (2005-03-22),

11. 6674241 - Plasma processing apparatus and method of controlling chemistry (2004-01-06),

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