This inventor holds 11 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2004-2011.
Location History:
- Phoenix, AZ (US) (2005)
- Marblehead, MA (US) (2004 - 2011)
Company Filing History:
Years Active: 2004-2011
Title: Paul Moroz: Innovator in Plasma Processing Technology
Introduction
Paul Moroz is a distinguished inventor based in Marblehead, MA (US), known for his significant contributions to plasma processing technology. With a total of 11 patents to his name, Moroz has made remarkable advancements in the field, particularly in semiconductor device fabrication.
Latest Patents
Among his latest innovations is the "Electron beam enhanced surface wave plasma source." This patent describes a plasma processing system that generates plasma using a ballistic electron beam in conjunction with a surface wave plasma (SWP) source, such as a radial line slot antenna (RLSA). The system features a resonator plate with a partially open, electrically conductive layer that is coupled to the surface of the resonator plate. A direct current (DC) voltage is applied to this conductive layer, enhancing the plasma generation process. Another notable patent is the "Radial line slot antenna having a conductive layer," which also focuses on generating plasma during semiconductor device fabrication. This invention similarly utilizes a resonator plate with an electrically conductive layer formed at the interface between the resonator plate and the plasma.
Career Highlights
Paul Moroz is currently employed at Tokyo Electron Limited, where he continues to innovate and develop cutting-edge technologies in the semiconductor industry. His work has been instrumental in advancing plasma processing techniques, which are crucial for the fabrication of modern electronic devices.
Collaborations
Throughout his career, Moroz has collaborated with notable colleagues, including Eric J Strang and William Dale Jones. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
In summary, Paul Moroz is a prominent inventor whose work in plasma processing technology has significantly impacted the semiconductor industry. His innovative patents and collaborations highlight his dedication to advancing technology and improving fabrication processes.