The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Jan. 28, 2004
Applicants:
Andrej S Mitrovic, Phoenix, AZ (US);
Maolin Long, Santa Clara, CA (US);
Paul Moroz, Marblehead, MA (US);
Steven T Fink, Mesa, AZ (US);
William D Jones, Phoenix, AZ (US);
Inventors:
Andrej S Mitrovic, Phoenix, AZ (US);
Maolin Long, Santa Clara, CA (US);
Paul Moroz, Marblehead, MA (US);
Steven T Fink, Mesa, AZ (US);
William D Jones, Phoenix, AZ (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract
A device and method for controlling the temperature of a plasma chamber inside wall or other surfaces exposed to the plasma by a plurality of temperature control systems. A plasma process within the plasma chamber can be controlled by independently controlling the temperature of segments of the wall or other surfaces.