Pao-Sheng Chen

Title: **Innovations by Inventor Pao-Sheng Chen**

Introduction

Pao-Sheng Chen is a notable inventor based in Tainan, Taiwan, recognized for his significant contributions to the field of semiconductor technology. With a total of two patents to his name, he continues to push the boundaries of innovation in the semiconductor industry, particularly in manufacturing techniques and processes.

Latest Patents

Chen's latest patents include a groundbreaking **Method for Forming Semiconductor Device**. This method involves forming a metal layer on a semiconductor substrate and subsequently adding a dielectric layer over it. The process is refined through systematic etching and removal practices, ultimately leading to the formation of a conductor extending through the dielectric layer in contact with the metal layer.

In addition, he holds a patent for a **Method for Manufacturing Semiconductor Device and Pre-Clean Apparatus**. This innovative technique entails providing a substrate and forming various first metal layers on it. A dielectric structure with through holes is crafted over these layers, exposing the metal below. A pre-clean operation employing an alcohol-based or aldehyde-based vapor as a reduction agent is then performed to prepare the dielectric structure and the first metal layers for subsequent conductor formation.

Career Highlights

Pao-Sheng Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he plays an integral role in advancing semiconductor fabrication methods. His expertise in the field has garnered attention and respect amongst his peers and the broader technological community.

Collaborations

Chen collaborates closely with esteemed colleagues such as Jung-Tang Wu and Pei-Hsuan Lee. Together, they contribute to innovative projects that aim to enhance the efficiency and effectiveness of semiconductor devices.

Conclusion

Pao-Sheng Chen's innovative spirit and technical expertise in semiconductor technology position him as a leading inventor in his field. His patents reflect a dedication to advancing manufacturing processes that will undoubtedly shape the future of technology. Through his work at Taiwan Semiconductor Manufacturing Company Limited and collaborations with talented colleagues, Chen continues to make a significant impact on the semiconductor industry.