This inventor holds 4 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 1994-2003.
Location History:
- Taipei, TW (1994 - 1995)
- Hsin-Chu, TW (2001 - 2003)
Company Filing History:
Years Active: 1994-2003
Title: Pao-Ling Kuo: Innovator in Semiconductor Technology
Introduction
Pao-Ling Kuo is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the calibration of wafer transfer systems. With a total of 4 patents to his name, Kuo's work has had a substantial impact on the efficiency and accuracy of semiconductor manufacturing processes.
Latest Patents
One of Kuo's latest patents is a method to calibrate the wafer transfer for oxide etchers, specifically designed for use with clamps. This innovative method involves the use of an inspection control wafer that features a polysilicon layer over an oxide layer on a semiconductor substrate. The polysilicon layer is strategically designed not to cover the oxide layer for a specified distance from the wafer's edge. The inspection control wafer is then introduced into the wafer transfer system, where it is transferred to a spin-on-glass etchback chamber. The wafer is held by clamps that extend a second distance from the edge of the wafer, creating an overlap difference between the first and second distances. After undergoing a spin-on-glass etchback step, the wafer is inspected for any damage to the oxide layer. If damage occurs, it indicates the need for recalibration of the wafer transfer system.
Career Highlights
Pao-Ling Kuo is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in wafer transfer calibration has positioned him as a key player in enhancing manufacturing processes. Kuo's innovative approaches have contributed to the overall advancement of semiconductor technology.
Collaborations
Kuo has collaborated with notable colleagues, including Yung-Haw Liaw and Hsin-Chieh Huang. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the semiconductor field.
Conclusion
Pao-Ling Kuo's contributions to semiconductor technology, particularly through his innovative patents, have established him as a significant figure in the industry. His work continues to influence the efficiency of semiconductor manufacturing processes, showcasing the importance of innovation in this critical field.