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Shiroyama-Machi, Japan

Osamu Tanigawa

USPTO Granted Patents = 5

Average Co-Inventor Count = 1.2

ph-index = 4

Forward Citations = 464(Granted Patents)

Location History:

Kanagawa-Ken, JP (1999)
Nagoya, JP (2001)
Shiroyama-machi, JP (2002 - 2005)

Company Filing History:

5 out of 10,307

Tokyo Electron Limited

Years Active: 1999-2005

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6902369 - Elevating mechanism, carrier conveying apparatus and heat treatment installation (2005-06-07),

2. 6499933 - Elevating mechanism, carrier conveying apparatus and heat treatment installation (2002-12-31),

3. 6390754 - Wafer processing apparatus, method of operating the same and wafer detecting system (2002-05-21),

4. 6302927 - Method and apparatus for wafer processing (2001-10-16),

5. 5915957 - Method of transferring target substrates in semiconductor processing (1999-06-29),

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