Company Filing History:
Years Active: 2009-2012
Title: Odette Turmel: Innovator in Plasma Processing Technology
Introduction
Odette Turmel is a prominent inventor based in Fremont, CA, known for her significant contributions to plasma processing technology. With a total of 4 patents to her name, she has made remarkable advancements in the field, particularly in methods that enhance semiconductor manufacturing processes.
Latest Patents
One of her latest patents is titled "Selectivity control in a plasma processing system." This innovative method involves etching features through specific layers on semiconductor substrates by utilizing a plasma processing chamber. The process includes flowing an etchant gas mixture and striking a plasma from the etchant source gas. The method ensures that the etching occurs with a selectivity that meets predefined thresholds, thereby improving the efficiency of semiconductor fabrication.
Another notable patent is the "Method for tunably repairing low-k dielectric damage." This method addresses damage to silicon-based low-k dielectric layers by using organic compounds. It involves providing a precursor gas that includes repair agents designed to bond with the low-k dielectric, effectively forming a protective monolayer. This innovation is crucial for maintaining the integrity of semiconductor materials during processing.
Career Highlights
Odette Turmel is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. Her work at Lam Research has positioned her as a key player in advancing technologies that are essential for modern electronics.
Collaborations
Throughout her career, Odette has collaborated with notable colleagues, including Kenji Takeshita and Felix Leib Kozakevich. These collaborations have fostered an environment of innovation and have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Odette Turmel's contributions to plasma processing technology and her innovative patents highlight her role as a leading inventor in the field. Her work continues to influence the semiconductor industry, paving the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.