Company Filing History:
Years Active: 2007
Title: The Innovations of Inventor Nortbert Bowering
Introduction: Nortbert Bowering, an accomplished inventor based in San Diego, CA, has made significant contributions to the field of plasma technology. With a unique patent under his name, Bowering exemplifies the innovative spirit that drives advancements in modern technology.
Latest Patents: Bowering holds a patent for a Discharge Produced Plasma (DPP) EUV light source. This invention features a debris mitigation apparatus utilizing a metal halogen gas to create metal halides from the debris expelled from the plasma. The cutting-edge EUV source is equipped with a debris shield, consisting of multiple curvilinear shield members equipped with inner and outer surfaces that are interconnected by light passages aligned to a focal point. These shield members alternate with open spaces and are designed to create a circular geometry in one axis of rotation and an elliptical shape in another. Additionally, the invention includes a temperature control mechanism that regulates the temperature of the shell members, optimizing the glancing angle of incidence reflections, or it may incorporate a mechanical positioner for precise positioning of the shell members.
Career Highlights: Currently, Bowering is associated with Cymer, Inc., a notable company in the realm of advanced light sources for semiconductor manufacturing. His tenure at Cymer showcases his commitment to innovation and technological advancement in the industry.
Collaborations: Throughout his career, Bowering has worked alongside distinguished professionals, including Igor Vladimirovich Fomenkov and William N Partlo. These collaborations highlight the importance of teamwork in fostering innovation and developing new technologies.
Conclusion: Nortbert Bowering's contributions to the field of plasma technology through his patent for a DPP EUV light source are a testament to his innovative approach as an inventor. With his work at Cymer, Inc. and collaborations with fellow professionals, Bowering continues to play an influential role in advancing technology and shaping the future of the industry.