Company Filing History:
Years Active: 2018-2021
Title: Norio Baba: Innovator in Heat Treatment Technology
Introduction
Norio Baba is a prominent inventor based in Iwate, Japan. He has made significant contributions to the field of heat treatment technology, holding a total of 2 patents. His work focuses on improving processes and apparatuses that enhance substrate processing.
Latest Patents
Norio Baba's latest patents include a heat treatment apparatus and a heat treatment method. The heat treatment apparatus features a heating unit surrounding a processing container that accommodates a substrate. It also includes multiple blowing units designed to blow a cooling medium into the space between the processing container and the heating unit. Additionally, a shutter is incorporated to simultaneously open or close at least two of the blowing units, with a slit formed corresponding to each unit. Another notable patent is for a clamp apparatus and substrate carry-in/out apparatus. This clamp apparatus is designed to contact a substrate accommodating container from above, fixing it in place when the cover on the front surface is opened or closed. It includes a driving mechanism to operate the clamp member, a casing to cover the mechanism, a suction port, an exhaust chamber, and a fan within the exhaust chamber.
Career Highlights
Norio Baba is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His innovative work has contributed to advancements in substrate processing technologies, making significant impacts in the field.
Collaborations
Some of his notable coworkers include Tatsuya Yamaguchi and Yasuaki Kikuchi. Their collaborative efforts have further enhanced the development of innovative technologies within their organization.
Conclusion
Norio Baba's contributions to heat treatment technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His inventions continue to influence substrate processing methods, showcasing the importance of innovation in technology.