The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Mar. 15, 2016
Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus
Tokyo Electron Limited, Tokyo, JP;
Mitsuru Obara, Iwate, JP;
Hisashi Inoue, Iwate, JP;
Keishi Shionaga, Iwate, JP;
Masahiro Kobayashi, Iwate, JP;
Norio Baba, Iwate, JP;
Hiroshi Kikuchi, Iwate, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The clamp apparatus of the present disclosure includes a clamp member configured to contact a substrate accommodating container from an upper side and fix the substrate accommodating container to a predetermined position when a cover provided on a front surface of the substrate accommodating container is opened/closed, a driving mechanism configured to drive the clamp member; a casing configured to cover the driving mechanism, a suction port configured to communicate with the casing, an exhaust chamber provided near the casing, and a fan provided inside the exhaust chamber.