Norikazu Baba

Title: Norikazu Baba: Innovator in Imprint Technology

Introduction

Norikazu Baba is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the field of imprint technology, holding a total of 3 patents. His work focuses on improving the efficiency and accuracy of imprint processes used in manufacturing.

Latest Patents

One of Baba's latest patents is an "Imprint apparatus and method of manufacturing article." This invention provides an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold. The apparatus includes a deformation device that deforms the mold into a convex shape, a detector that detects interference fringes from light reflected off the mold and substrate, and a controller that manages the deformation and pressing processes. The controller estimates and corrects errors in the pressing direction based on the detected interference fringes, ensuring a precise imprint.

Another notable patent is the "Method of performing analysis of pattern defect, imprint apparatus, and article manufacturing method." This method analyzes defects in the pattern of an imprint material on a substrate after the imprint process. It involves obtaining a defect distribution and map information of the imprint material arrangement, allowing for the determination of defect types based on their positions relative to gaps in the imprint material.

Career Highlights

Norikazu Baba is associated with Canon Kabushiki Kaisha, a leading company in imaging and printing technologies. His work at Canon has allowed him to develop innovative solutions that enhance the capabilities of imprint technology.

Collaborations

Baba collaborates with Kiyohito Yamamoto, contributing to advancements in their field through shared expertise and innovative ideas.

Conclusion

Norikazu Baba's contributions to imprint technology through his patents and work at Canon Kabushiki Kaisha highlight his role as a key innovator in the industry. His inventions continue to influence the manufacturing processes, ensuring higher precision and efficiency.