The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2016
Filed:
May. 05, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Norikazu Baba, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An exposure apparatus advantageous for reducing the driving time of a stage is provided. In the apparatus, an input of an arrangement of exposure shots and an exposure order are received. An input of an upper limit acceleration value and an upper limit velocity value of the stage are received. A target locus of the stage is created using constrained-quadratic-linear programming such that the driving time of the stage from the end of an exposure to the start of the next exposure is within an acceptable value range, based on the input arrangement of exposure shots and exposure order, and the input upper limit acceleration value and upper limit velocity value. A driving unit that drives the stage is controlled based on the created target locus.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile