The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Jun. 11, 2018
Canon Kabushiki Kaisha, Tokyo, JP;
Norikazu Baba, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising: a deformation device configured to deform the mold to a convex shape; a detector configured to detect interference fringes for light reflected from the mold and light reflected from the substrate; and a controller configured to control the deformation device to deform the mold to the convex shape, and control a pressing process so that a contact area between the mold and the imprint material on the substrate gradually increases, wherein the controller, in the pressing process, estimates an error for a pressing direction between the mold and the imprint material based on the interference fringes detected by the detector, and corrects the pressing direction so that the error is reduced.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile