Location History:
- Yokohama, JP (1986 - 1987)
- Tokyo, JP (1989 - 1994)
- Kasugai, JP (1999)
- Kawasaki, JP (1995 - 2000)
Company Filing History:
11 out of 39,244 
2 out of 2,253 
Years Active: 1986-2000
Title: Nobuyuki Yasutake: Innovator in Charged Particle Beam Technology
Introduction
Nobuyuki Yasutake is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 11 patents. His innovative work has advanced the capabilities of exposure systems used in various applications.
Latest Patents
Yasutake's latest patents include a method and system for charged particle beam exposure. This invention utilizes a scanning stage where multiple wafers are mounted through wafer holders. The system incorporates a balancing stage that ensures the barycenter remains fixed during operation. By measuring the positions of reflecting mirrors and calculating deviations from target positions, the technology allows for precise corrections using deflectors. This method enhances the accuracy and efficiency of charged particle beam exposure processes.
Career Highlights
Throughout his career, Yasutake has worked with notable companies such as Fujitsu Corporation and Advantest Corporation. His experience in these organizations has contributed to his expertise in developing advanced technologies in the semiconductor industry.
Collaborations
Yasutake has collaborated with esteemed colleagues, including Yasushi Takahashi and Hiroshi Yasuda. Their combined efforts have fostered innovation and progress in their respective fields.
Conclusion
Nobuyuki Yasutake's contributions to charged particle beam technology exemplify his dedication to innovation. His patents and collaborations reflect a commitment to advancing the industry and enhancing technological capabilities.