Company Filing History:
Years Active: 2023-2024
Title: Nobuya Yamada: Innovator in Substrate Processing Technology
Introduction
Nobuya Yamada is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology. With a total of two patents to his name, Yamada's work focuses on improving the efficiency of preprocessing substrates.
Latest Patents
Yamada's latest patents include a pre-wet module, a deaerated liquid circulation system, and a pre-wet method. These innovations are designed to perform preprocessing efficiently on a substrate. The pre-wet module consists of a deaeration tank, a processing device, a substrate holder, and a drive mechanism. The deaeration tank is configured to house a deaerated liquid. The processing device includes a nozzle that supplies a cleaning liquid to the surface of a substrate that is facing upward. The substrate holder is positioned between the deaeration tank and the processing device. It features a first holding member for a first substrate and a second holding member for a second substrate. The drive mechanism is responsible for rotating and moving the substrate holder up and down. It includes both a rotation mechanism and an elevating mechanism. The rotation mechanism allows the substrate holder to switch between two states: one where the surface of the first substrate is opposed to the deaerated liquid in the tank, and another where the second substrate's surface is opposed to the same liquid. The elevating mechanism facilitates the vertical movement of the substrate holder.
Career Highlights
Yamada is currently employed at Ebara Corporation, a leading company in the field of fluid machinery and environmental engineering. His work at Ebara has allowed him to develop and refine his innovative technologies.
Collaborations
Yamada collaborates with notable colleagues, including Masaya Seki and Mitsutoshi Yahagi. Their teamwork contributes to the advancement of substrate processing technologies.
Conclusion
Nobuya Yamada is a key figure in the development of innovative substrate processing solutions. His patents reflect a commitment to enhancing efficiency in this critical area of technology.