Ebara Corporation

Nobuya Yamada

Masaya Seki

Mitsutoshi Yahagi

A preprocess is efficiently performed on a substrate. A pre-wet moduleincludes a deaeration tank, a processing device, a substrate holder, and a drive mechanism. The deaeration tankis configured to house a deaerated liquid. The processing deviceincludes a nozzleconfigured to supply a cleaning liquid to a surface to be processed of a substrate having the surface to be processed facing upward. The substrate holderis disposed between the deaeration tankand the processing device. The substrate holderincludes a first holding memberconfigured to hold a first substrate and a second holding memberconfigured to hold a second substrate. The drive mechanismis configured to rotate and move up and down the substrate holder. The drive mechanismincludes a rotation mechanismand an elevating mechanism. The rotation mechanismis configured to rotate the substrate holderbetween a first state where a surface to be processed of the first substrate is opposed to a deaerated liquid in the deaeration tankand a second state where a surface to be processed of the second substrate is opposed to the deaerated liquid in the deaeration tank. The elevating mechanismis configured to move up and down the substrate holder

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Tokyo, Japan

Nobuya Yamada