The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Oct. 25, 2023
Ebara Corporation, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A preprocess is efficiently performed on a substrate. A pre-wet moduleincludes a deaeration tank, a processing device, a substrate holder, and a drive mechanism. The deaeration tankis configured to house a deaerated liquid. The processing deviceincludes a nozzleconfigured to supply a cleaning liquid to a surface to be processed of a substrate having the surface to be processed facing upward. The substrate holderis disposed between the deaeration tankand the processing device. The substrate holderincludes a first holding memberconfigured to hold a first substrate and a second holding memberconfigured to hold a second substrate. The drive mechanismis configured to rotate and move up and down the substrate holder. The drive mechanismincludes a rotation mechanismand an elevating mechanism. The rotation mechanismis configured to rotate the substrate holderbetween a first state where a surface to be processed of the first substrate is opposed to a deaerated liquid in the deaeration tankand a second state where a surface to be processed of the second substrate is opposed to the deaerated liquid in the deaeration tank. The elevating mechanismis configured to move up and down the substrate holder