Company Filing History:
Years Active: 2017-2025
Title: Nobutaka Sasaki: Innovator in Plasma Processing Technology
Introduction
Nobutaka Sasaki is a prominent inventor based in Miyagi, Japan, known for his significant contributions to plasma processing technology. With a total of 10 patents to his name, he has made remarkable advancements in the field, particularly in the design and functionality of plasma processing apparatuses.
Latest Patents
Sasaki's latest patents include a plasma processing apparatus that features a plasma processing chamber, a plasma generator, and a substrate support. This innovative apparatus is designed to generate plasma from a processing gas, enhancing the efficiency of substrate processing. Another notable patent is a substrate processing system that integrates a plasma processing apparatus with a decompression transferrer. This system includes control circuitry that manages the loading and stabilization of an edge ring during plasma processing, ensuring optimal performance.
Career Highlights
Nobutaka Sasaki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing the capabilities of plasma processing technologies, which are crucial for the production of high-quality semiconductor devices.
Collaborations
Sasaki has collaborated with talented individuals such as Gyeong Min Park and Shin Matsuura, contributing to the development of innovative solutions in the field of plasma processing.
Conclusion
Nobutaka Sasaki's contributions to plasma processing technology have established him as a key figure in the industry. His innovative patents and collaborative efforts continue to influence advancements in semiconductor manufacturing.