Nobuhiko Mouri

Title: Innovations by Nobuhiko Mouri in Substrate Processing Technologies

Introduction

Nobuhiko Mouri, an accomplished inventor based in Koshi, Japan, has made significant contributions to the field of substrate processing technologies. With a portfolio of seven patents to his name, Mouri has developed innovative methods and apparatuses that enhance the efficiency and effectiveness of cleaning substrates in various applications.

Latest Patents

Among his recent innovations are two patents focused on substrate processing apparatus and methods. The first patent describes a substrate processing method that includes a dual-surface cleaning process, employing a first cleaning body that ejects fluid onto one surface or contacts it directly. This process is synchronized with a second cleaning body that engages the remaining surface, ensuring thorough cleaning. In addition to this, Mouri's method includes a side end cleaning process, using a third cleaning body that is rotated and brought into contact with the side end of the substrate, enhancing the overall cleaning efficiency.

The second patent outlines a substrate processing apparatus that consists of several components including a substrate holder, multiple cleaning bodies, moving mechanisms, and a controller that orchestrates the cleaning processes. This apparatus is designed to perform the simultaneous dual-surface cleaning, significantly optimizing the substrate handling and preparation phase.

Career Highlights

Nobuhiko Mouri's contributions to the substrate processing field have been pivotal in enhancing production processes within the industry. He is currently employed at Tokyo Electron Limited, a prominent player in semiconductor and electronics manufacturing. Mouri's expertise has leveraged substantial advancements in substrate cleaning methodologies, beneficial for a variety of technological applications.

Collaborations

Throughout his career, Mouri has collaborated with talented individuals, including his coworkers Takanori Obaru and Yasushi Takiguchi. These collaborations have fostered an environment of innovation, leading to the development of groundbreaking technologies that improve substrate processing techniques.

Conclusion

Nobuhiko Mouri continues to push the boundaries of innovation in substrate processing technologies. With his extensive patent portfolio and his role at Tokyo Electron Limited, he remains at the forefront of advancements that drive efficiency and precision in the industry. His work exemplifies the profound impact that dedicated inventors can have on technology and manufacturing processes.