Nikolay Artemiev

Title: Innovations by Inventor Nikolay Artemiev

Introduction

Nikolay Artemiev, an esteemed inventor based in Berkeley, CA, has made significant contributions to the field of optical systems and semiconductor metrology. With a total of eight patents to his name, Artemiev has developed innovative technologies that improve the performance and accuracy of x-ray-based systems.

Latest Patents

Among his latest inventions, two notable patents stand out. The first is for **Soft x-ray optics with improved filtering**, which introduces optical elements designed to efficiently propagate x-ray radiation within a specified energy range while rejecting unwanted radiation. This innovation utilizes an integrated optical filter with material layers that absorb radiation outside the desired energy band, enhancing the optical performance by suppressing reflectivity across various spectrum portions, including infrared, visible, ultraviolet, and extreme ultraviolet regions. Additionally, diffusion barrier layers are incorporated to prevent degradation of the integrated optical filter, as well as diffusion between various material layers.

The second important patent relates to **methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction**. This patent outlines methodologies for measuring semiconductor structures utilizing high-brightness, polychromatic reflective small angle x-ray scatterometry (RSAXS). The measurements can be performed efficiently over a range of wavelengths, angles, and azimuth angles, with a small illumination beam spot size. Features include x-ray illumination at grazing angles of incidence between 5-20 degrees and a demagnification factor allowing spot sizes of less than two micrometers on semiconductor wafers.

Career Highlights

Nikolay Artemiev has worked with leading companies in the industry, including Kla TenCor Corporation and Kla Corporation. His work at these organizations has contributed significantly to advancements in x-ray optics and semiconductor technologies, showcasing his expertise and commitment to innovation.

Collaborations

Throughout his career, Artemiev has collaborated with talented individuals such as Alexander Kuznetsov and Alexander Bykanov. These collaborations have fostered an environment ripe for innovation and have undoubtedly contributed to the successful development of his patents.

Conclusion

Nikolay Artemiev is a notable figure in the realm of x-ray optics and semiconductor metrology. With his groundbreaking inventions and collaborations, he has established himself as a key innovator in his field, continually pushing the boundaries of technology for improved performance and accuracy.