Marlborough, MA, United States of America

Nicole E Thomas


Average Co-Inventor Count = 7.2

ph-index = 2

Forward Citations = 31(Granted Patents)


Location History:

  • Brewster, NY (US) (2014)
  • Bolton, MA (US) (2015)
  • Marlborough, MA (US) (2017)

Company Filing History:


Years Active: 2014-2017

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3 patents (USPTO):Explore Patents

Title: Innovations of Inventor Nicole E Thomas

Introduction

Nicole E Thomas is a prominent inventor based in Marlborough, MA (US). She has made significant contributions to the field of microelectronics, holding a total of three patents. Her work focuses on the development of compositions and processes that enhance the efficiency of microelectronic devices.

Latest Patents

One of her latest patents is titled "Composition and process for selectively etching metal nitrides." This invention involves a removal composition and process for selectively removing a first metal gate material, such as titanium nitride, relative to a second metal gate material, like tantalum nitride, from a microelectronic device. The removal composition can include fluoride or be substantially devoid of it. The substrate is designed to comprise a high-k/metal gate integration scheme.

Another notable patent is "Compositions and methods for the selective removal of silicon nitride." This invention provides compositions useful for the selective removal of silicon nitride materials relative to poly-silicon, silicon oxide materials, and/or silicide materials from a microelectronic device. The removal compositions include fluorosilicic acid, silicic acid, and at least one organic solvent. Typical process temperatures are less than about 100°C, and the selectivity for nitride versus oxide etch ranges from about 200:1 to about 2000:1. Under typical process conditions, nickel-based silicides, as well as titanium and tantalum nitrides, remain largely unaffected, while polysilicon etch rates are less than about 1 μm/min.

Career Highlights

Throughout her career, Nicole has worked with notable companies such as Advanced Technology Materials, Inc. and Entegris, Inc. Her expertise in microelectronics has positioned her as a valuable asset in the industry.

Collaborations

Nicole has collaborated with several professionals in her field, including Emanuel Israel Cooper and Eileen Sparks. These collaborations have contributed to her innovative work and the advancement of microelectronic technologies.

Conclusion

Nicole E Thomas is a distinguished inventor whose contributions to microelectronics have led to significant advancements in the field. Her innovative patents and collaborations reflect her commitment to enhancing technology in microelectronic devices.

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