Company Filing History:
Years Active: 2019-2025
Title: Natsumi Torii: Innovator in Plasma Processing Technology
Introduction
Natsumi Torii is a prominent inventor based in Miyagi, Japan. She has made significant contributions to the field of plasma processing technology, holding a total of six patents. Her innovative work has advanced the capabilities of plasma processing apparatuses and methods, making her a key figure in her industry.
Latest Patents
Among her latest patents is a plasma processing apparatus and plasma processing method. This invention includes a chamber, a substrate support with an electrostatic chuck, and a Radio Frequency (RF) power supply for generating plasma. Additionally, it features a DC power supply for applying a negative DC voltage to the edge ring, along with a waveform control element for managing the waveform of the DC voltage. Another notable patent is a plasma processing apparatus that comprises a chamber, a substrate support with a lower electrode, and an upper electrode. This apparatus is designed to supply multiple powers with different frequencies, enhancing the efficiency of plasma processing.
Career Highlights
Natsumi Torii is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. Her work at this organization has allowed her to develop cutting-edge technologies that are essential for modern manufacturing processes.
Collaborations
Throughout her career, Natsumi has collaborated with notable colleagues, including Koichi Nagami and Chishio Koshimizu. These partnerships have fostered innovation and contributed to the success of her projects.
Conclusion
Natsumi Torii's contributions to plasma processing technology exemplify her dedication to innovation and excellence. Her patents and work at Tokyo Electron Limited highlight her role as a leading inventor in her field.