The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Dec. 02, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Natsumi Torii, Miyagi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32935 (2013.01); H01J 37/32174 (2013.01);
Abstract
There is provided a wiring abnormality detection method in a plasma processing apparatus. The detection method comprises: applying a DC voltage from a DC power supply; measuring a current flowing in a circuit constituting a DC power supply system; comparing a measured current with a predetermined threshold value; and determining that wiring abnormality has occurred in the circuit constituting the DC power supply system when the measured current is greater than or equal to the threshold value.