Narayanan Meyyappan

Title: Narayanan Meyyappan: Innovator in Silicon Technology

Introduction

Narayanan Meyyappan is a notable inventor based in Woburn, MA (US). He has made significant contributions to the field of silicon technology, particularly in the development of methods for creating silicon-on-insulator (SOI) wafers. With a total of 2 patents, his work has had a profound impact on the production of low-power and low-voltage CMOS devices.

Latest Patents

Meyyappan's latest patents include a method of treating silicon to obtain a thin, buried insulating layer. This innovative technique is designed to produce high-quality SOI material at a relatively low cost. The method involves implanting a very low dose of nitrogen or oxygen ions into silicon and subsequently diffusing oxygen during an annealing process. This results in the formation of a continuous buried layer of silicon-oxy-nitride or SiO2. The process utilizes an ion beam to implant ions into the substrate, which damages a region of the crystal, allowing for the creation of a thin layer of insulating material just below the wafer's surface.

Another significant patent is the shallow SIMOX processing method using molecular ion implantation. This invention provides a method for forming shallow SIMOX substrates by implanting molecular oxygen ions instead of atomic oxygen ions. This approach effectively doubles the yield of oxygen atoms implanted for each unit of electric charge deposited in the wafer, while maintaining a defect density comparable to traditional SIMOX processes.

Career Highlights

Throughout his career, Narayanan Meyyappan has worked with prominent companies such as Sharp Microelectronics Technology, Inc. and Sharp Kabushiki Kaisha Corporation. His expertise in silicon technology has made him a valuable asset in the field.

Collaborations

Meyyappan has collaborated with various professionals, including his coworker Tatsuo Nakato, to advance the development of innovative technologies in silicon processing.

Conclusion

Narayanan Meyyappan's contributions to silicon technology through his patents and career achievements highlight his role as a leading inventor in the field. His innovative methods continue to influence the production of advanced semiconductor devices.