Location History:
- Wappingers Falls, NY (US) (1996 - 1999)
- Gainsville, VA (US) (1999)
- Manassas, VA (US) (2000)
- Wappinger Falls, NY (US) (2002)
Company Filing History:
6 out of 52,735 
2 out of 30,045 
1 out of 58 Years Active: 1996-2002
Title: Naohiro Shoda: Innovator in Semiconductor Technology
Introduction
Naohiro Shoda is a prominent inventor based in Wappingers Falls, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work has advanced the methods and apparatus used in wafer processing, showcasing his expertise and innovative spirit.
Latest Patents
One of Naohiro Shoda's latest patents is a semiconductor workpiece processing apparatus and method. This invention includes a processing chamber with a chuck that supports a wafer, along with a pedestal spaced apart from the chuck. The apparatus features a first gas layer between the chuck and the wafer, and a second gas layer between the pedestal and the chuck. The pressure of the first gas layer is controlled to maintain a constant thermal conductivity, while the second gas layer's pressure is adjusted to manage heat transfer to and from the pedestal. Another notable patent is a method for manufacturing a shallow trench isolation structure. This method involves several steps, including forming a resist pattern on a substrate, etching to create a shallow trench, and depositing layers to complete the structure.
Career Highlights
Throughout his career, Naohiro Shoda has worked with esteemed companies such as Kabushiki Kaisha Toshiba and Siemens Aktiengesellschaft. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.
Collaborations
Naohiro has collaborated with notable professionals in his field, including Peter Weigand and Katsuya Okumura. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Naohiro Shoda's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in wafer processing and isolation structures, solidifying his legacy as a significant inventor.