The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2000
Filed:
Aug. 22, 1997
Naohiro Shoda, Manassas, VA (US);
Peter Weigand, Unterhaching, DE;
Siemens Microelectronics, Inc., Cupertino, CA (US);
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A method for fabricating a shallow trench isolation structure involves several steps. The steps of an illustrative method include forming a first resist pattern on a substrate, etching the substrate to form a shallow trench therein using the first resist pattern as a mask, removing the first resist pattern from the substrate, depositing an oxide layer on the substrate including in the shallow trench, depositing a polish stop layer on the oxide layer, forming a second resist pattern on a portion of the polish stop layer substantially covering the shallow trench using the same mask as the mask for the first resist pattern, etching the polish stop layer, removing the second resist pattern leaving the portion of the polish stop layer substantially covering the shallow trench, polishing the oxide layer using the portion of the polish stop layer substantially covering the shallow trench as a polish stop, and removing the portion of the polish stop layer substantially covering the shallow trench.