Company Filing History:
Years Active: 2016-2017
Title: Nao Koizumi: Innovator in Plasma Processing Technology
Introduction
Nao Koizumi is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His work focuses on innovative methods for etching multilayered materials, which are crucial in various technological applications.
Latest Patents
Koizumi's latest patents include a plasma processing method and a plasma processing apparatus. The plasma processing method involves etching a multilayered material that consists of a first magnetic layer and a second magnetic layer, separated by an insulating layer. This method utilizes a processing chamber where a processing space is formed, along with a gas supply unit that introduces a processing gas into the chamber. The first etching process etches the first magnetic layer using a first processing gas, generating plasma, and halting the process at the insulating layer's surface. The second etching process removes any residue by supplying a second processing gas and generating plasma. The materials involved include CoFeB, with the first processing gas containing Cl and the second processing gas containing H.
Another notable patent is an etching method and substrate processing apparatus that optimizes the gas used for etching a metal stacked film. This method includes etching the multilayered film with plasma generated from a gas containing C, O, and H, and treating the film with plasma from a gas containing CF.
Career Highlights
Nao Koizumi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His work at the company has allowed him to develop and refine his innovative plasma processing techniques, contributing to advancements in the field.
Collaborations
Throughout his career, Koizumi has collaborated with notable colleagues such as Eiichi Nishimura and Masato Kushibiki. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Nao Koizumi is a distinguished inventor whose work in plasma processing technology has led to significant advancements in the field. His innovative patents and contributions to Tokyo Electron Limited highlight his commitment to pushing the boundaries of technology.