Nan-Jung Chen

Title: Innovations of Nan-Jung Chen

Introduction

Nan-Jung Chen is a prominent inventor based in Toufen Town, Taiwan. He has made significant contributions to the field of photolithography, particularly in the quality assessment of light sources. With a total of six patents to his name, Chen's work has had a notable impact on the semiconductor industry.

Latest Patents

One of Chen's latest patents focuses on methods for determining the quality of a light source applied to a photolithographic process. This innovative method involves exposing an image sensor array to light from a light source. The process collects addresses and respective intensities corresponding to various locations on a pupil map, which represents the intensity of the light from the image sensor array. By defining at least one of an inner curve and an outer curve of the pupil map based on the collected data, the light source can be applied to a photolithographic process if the addresses exhibit a predetermined pattern relative to these curves.

Career Highlights

Nan-Jung Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in photolithography and light source quality assessment has positioned him as a valuable asset to the company.

Collaborations

Throughout his career, Chen has collaborated with notable colleagues, including Jui-Chung Peng and Kevin Hung. These collaborations have further enhanced his research and development efforts in the field.

Conclusion

Nan-Jung Chen's innovative work in photolithography and light source quality assessment has made a significant impact on the semiconductor industry. His contributions continue to advance the field and inspire future innovations.