Motozo Kurita

Title: Innovations of Motozo Kurita in Semiconductor Technology

Introduction

Motozo Kurita is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding three patents that showcase his innovative approach to manufacturing processes.

Latest Patents

Kurita's latest patents include a method for manufacturing semiconductor devices, an ion beam etching device, and a control device. The ion beam etching device features a grid positioned between a treatment chamber and a plasma generation chamber, which is essential for forming an ion beam by drawing ions from the plasma generation chamber. Additionally, it includes a gas introduction unit for introducing discharge gas into the plasma generation chamber, an exhaust for the treatment chamber, and a substrate holder. The control unit is designed to receive measurement results of in-plane film thickness distribution before substrate processing. An electromagnetic coil is also incorporated, which controls the currents applied to both the outer and inner coils based on the measurement results. This innovative design aims to improve the film thickness distribution processed by the chemical mechanical polishing (CMP) step, ultimately enhancing the performance of semiconductor devices.

Career Highlights

Kurita has dedicated his career to advancing semiconductor manufacturing techniques. His work at Canon Anelva Corporation has positioned him as a key player in the industry, where he continues to develop cutting-edge technologies that address the challenges faced in semiconductor fabrication.

Collaborations

Throughout his career, Kurita has collaborated with esteemed colleagues such as Yoshimitsu Kodaira and Yukito Nakagawa. These partnerships have fostered an environment of innovation and have contributed to the successful development of his patented technologies.

Conclusion

Motozo Kurita's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative methods and devices continue to influence the industry and pave the way for future advancements.