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Years Active: 2012
Title: The Innovations of Mitsuo Kato in Plasma Processing Technology
Introduction: Mitsuo Kato is a prominent inventor based in Kanagawa, Japan. He is well-known for his contributions to the field of plasma processing technology, particularly in the area of plasma measurement systems and methods. His innovative ideas have led to the development of a unique microwave plasma processing system that plays a crucial role in various applications.
Latest Patents: Mitsuo Kato holds a patent for a plasma processing system, plasma measurement system, plasma measurement method, and plasma control system. The patented technology includes a processing chamber designed to apply a desired process to a target object using plasma. Key components of this system include a susceptor in the chamber that supports the target object, a high-frequency power supply that delivers high-frequency electric power to the susceptor, a capacitor connected to the susceptor, and a measurement device that records voltages at the capacitor's plates when powered. This innovative design enhances the efficiency and accuracy of plasma processing.
Career Highlights: Throughout his career, Mitsuo Kato has worked with notable organizations that have contributed to his extensive knowledge in the field. He has been associated with Tokyo Electron Limited, where he further developed his expertise in plasma technologies. Additionally, his tenure at Tohoku University provided him with a strong foundation in research and innovation within academic settings.
Collaborations: Mitsuo Kato has collaborated with talented professionals such as Masaki Sugiyama and Akihiko Hiroe. Working alongside these individuals has allowed him to merge ideas and enhance the overall development of his patented technology.
Conclusion: Mitsuo Kato's inventions in plasma processing systems demonstrate his commitment to advancing technological solutions. His patent highlights the intricate processes involved in plasma measurement and control, underscoring the importance of innovation in modern industrial applications. Kato's work continues to influence the field and inspire future advancements in plasma technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.