Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,295 patents)
2. Tohoku University (1 from 982 patents)
1 patent:
1. 8241457 - Plasma processing system, plasma measurement system, plasma measurement method, and plasma control system