Mitsukazu Takahashi

Title: Mitsukazu Takahashi: Innovator in Substrate Processing Technology

Introduction

Mitsukazu Takahashi is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 13 patents. His innovative work has advanced the methods and apparatus used in substrate treatment, showcasing his expertise and dedication to the industry.

Latest Patents

Takahashi's latest patents include a substrate treating apparatus and a substrate treating method. The substrate treating apparatus features a treating unit and a controller. The treating unit comprises a substrate holder, a rotation driving unit, a treatment liquid supplying unit, a liquid collecting unit, and a guard driving unit. The substrate holder is designed to hold a substrate in a horizontal posture, while the rotation driving unit enables the substrate holder to rotate. The liquid collecting unit consists of a first guard, a second guard, and a liquid inlet, which is open toward the substrate held by the substrate holder. The guard driving unit is responsible for moving the second guard vertically, and the controller adjusts the height position of the liquid inlet based on the shape of the substrate.

Another notable patent is the substrate processing apparatus, substrate processing system, and substrate processing method. In this invention, a top plate is held by an opposing-member holder at a first position and by a substrate holder at a second position, allowing it to rotate along with the substrate holder. The apparatus includes a first processing liquid nozzle that supplies a first processing liquid to the substrate and a second processing liquid nozzle that supplies a second processing liquid, preventing the mixture of multiple types of processing liquids.

Career Highlights

Throughout his career, Mitsukazu Takahashi has worked with esteemed companies such as Screen Holdings Co., Ltd. and Dainippon Screen Manufacturing Co., Ltd. His experience in these organizations has contributed to his development as an inventor and has allowed him to refine his skills in substrate processing technology.

Collaborations

Takahashi has collaborated with notable coworkers, including Koji Hashimoto and Kazuhiro Honsho. Their combined expertise has likely fostered innovation and creativity in their projects.

Conclusion

Mitsukazu Takahashi's contributions to substrate processing technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative approaches continue to influence the industry and pave the way for future advancements