The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 2021

Filed:

Jul. 28, 2015
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Kazuhiro Honsho, Kyoto, JP;

Mitsukazu Takahashi, Kyoto, JP;

Akito Hatano, Kyoto, JP;

Koji Hashimoto, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01); B65D 43/02 (2006.01); B65D 85/30 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67309 (2013.01); B65D 43/0202 (2013.01); B65D 85/30 (2013.01); H01L 21/67369 (2013.01); H01L 21/67373 (2013.01); H01L 21/67383 (2013.01); H01L 21/67393 (2013.01); H01L 21/67772 (2013.01);
Abstract

A substrate container including a casing, a rack, a casing holder, a casing lifting mechanism, a lid, and a lid holder. When holding of substrates with the rack shifts to holding of the substrates with the casing holder and the lid holder, the casing lifting mechanism moves the casing holder upward, whereby the casing holder moves the substrates upward. When the holding of the substrates with the casing holder and the lid holder shifts to the holding of the substrates with the rack, the casing lifting mechanism moves the casing holder downward, whereby the casing holder moves the substrates downward.


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