Location History:
- Nakakoma-gun, JP (2001)
- Yamanashi-Ken, JP (2001 - 2003)
- Nirasaki, JP (2006)
Company Filing History:
Years Active: 2001-2006
Title: Minoru Yazawa: Innovator in Heat Treatment Technology
Introduction
Minoru Yazawa is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of heat treatment technology, holding a total of 4 patents. His work focuses on improving the efficiency and effectiveness of heating processes, particularly in semiconductor manufacturing.
Latest Patents
Yazawa's latest patents include a heat treatment apparatus that utilizes a lamp for rapidly and uniformly heating a wafer. This innovative apparatus allows for a quick temperature rise of the object being processed while maintaining excellent economic efficiency. The design features a heating unit that irradiates light onto the object, with multiple lamps arranged in a lamp house. The configuration includes at least one first lamp and several second lamps, each with a smaller irradiation area than the first lamp. This arrangement ensures optimal heating performance.
Another notable patent is a temperature measuring system aimed at eliminating the influence of stray light on a heating lamp when measuring the temperature of an object, such as a wafer. This invention employs a radiation thermometer and utilizes the relationship between the power supplied to the lamps and the optical energy they emit. By experimentally determining the influence of stray light on the output voltage of a photodiode, the system can accurately calculate the temperature of a susceptor.
Career Highlights
Minoru Yazawa is currently associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing heat treatment technologies that are critical for the production of high-quality semiconductor devices.
Collaborations
Yazawa has collaborated with notable colleagues, including Masahiro Shimizu and Tomohiro Suzuki. Their combined expertise has contributed to the development of innovative solutions in the field of heat treatment.
Conclusion
Minoru Yazawa's contributions to heat treatment technology have established him as a key figure in the semiconductor industry. His innovative patents reflect a commitment to enhancing efficiency and precision in manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.