The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
Mar. 29, 2000
Minoru Yazawa, Nakakoma-gun, JP;
Tokyo Electron Ltd., Tokyo, JP;
Abstract
From a side surface of a susceptor,, in parallel with a surface of the susceptor,and directing toward a center portion, a sensor insertion hole,is bored, in this sensor insertion hole,, a temperature sensor,is fixed. A tip of a sensor insertion hole,is communicated with a heat rays guide hole,that is bored from an upper surface of the susceptor,vertical to the surface. At a junction of a sensor insertion hole,and a heat rays guide hole,, a reflector,is formed with an angle of approximately 45° tilted with respect to an upper surface of a susceptor,. Heat rays radiated from a wafer W are led into a heat rays guide hole,and reflected at a reflector,to guide into a sensor insertion hole,and detect.