The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2003
Filed:
Sep. 07, 2000
Tomohiro Suzuki, Yamanashi-Ken, JP;
Shigeru Kasai, Yamanashi-Ken, JP;
Masahiro Shimizu, Kofu, JP;
Minoru Yazawa, Yamanashi-Ken, JP;
Tokyo Electron Limited, Tokyo-to, JP;
Abstract
The present invention aims to exclude the influence of stray light dye to a heating lamp when measuring the temperature of an object to be treated, such as a wafer, with the use of a radiation thermometer. The present invention utilizes the relationship between a power W supplied from an output control section to lamps and optical energy radiated from the lamps . Influence which the light radiated from the lamps exerts on the output voltage of a photodiode is experimentally found beforehand as a function of the power W, and stored in a computing section . The computing section subtracts the influence of stray light from the lamps , which is included in the output voltage of the photodiode , from the output value of the photodiode on the basis of the value of the power W transmitted from the output control section , and calculates the temperature of a susceptor