Minoru Sugiyama

Title: Minoru Sugiyama: Innovator in Semiconductor Processing Technology

Introduction

Minoru Sugiyama is a prominent inventor based in Kyoto, Japan, known for his significant contributions to semiconductor processing technology. With a total of six patents to his name, Sugiyama has made remarkable advancements in the field, particularly in the development of innovative processing devices.

Latest Patents

One of Sugiyama's latest patents is a development processing device that features a slit nozzle, which is moved by a nozzle lifting/lowering mechanism and a nozzle sliding mechanism. This device allows for the precise discharge of development liquid onto substrates held in a horizontal position by spin chucks. After the development liquid is applied, the slit nozzle is repositioned to a waiting position, where it undergoes cleaning processing with a specially formulated cleaning liquid mixed with gas bubbles.

Another notable patent is the cup and substrate processing apparatus. This invention includes a cup intermediate portion and a cup lower portion that surround a substrate. The design ensures that the spacing between the upper surface of the cup lower portion and the lower surface of the cup intermediate portion gradually decreases outward from the substrate's outer peripheral portion, optimizing the processing efficiency.

Career Highlights

Sugiyama has built a successful career at Screen Semiconductor Solutions Co., Ltd., where he has been instrumental in developing cutting-edge technologies for semiconductor manufacturing. His work has significantly impacted the efficiency and effectiveness of processing techniques in the industry.

Collaborations

Throughout his career, Sugiyama has collaborated with notable colleagues, including Masahiko Harumoto and Akira Yamaguchi. These partnerships have fostered innovation and contributed to the advancement of semiconductor technologies.

Conclusion

Minoru Sugiyama's contributions to semiconductor processing technology through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence the industry and pave the way for future advancements.