This inventor holds 23 USPTO granted patents, primarily in Wafer Polishing Technology. Top assignee: Tokyo Seimitsu Co., Ltd.. Active years: 1988-2006.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Tokyo, JP (2001 - 2005)
- Mitaka, JP (1988 - 2006)
Company Filing History:
Years Active: 1988-2006
Areas of Expertise:
Title: Minoru Numoto: Innovator in Wafer Polishing Technologies
Introduction
Minoru Numoto, a notable inventor based in Mitaka, Japan, has made significant contributions to the field of wafer polishing technologies. With an impressive portfolio of 23 patents, Numoto specializes in inventions that enhance the quality and efficiency of semiconductor manufacturing processes.
Latest Patents
Among his latest innovations, Numoto has developed a revolutionary wafer polisher. This device incorporates a retainer ring installed within a wafer holding head, which allows for a protective sheet material to be placed inside the ring. This design ensures that a wafer can be pressed against a polishing pad without causing wrinkles in the protective sheet material.
In addition to the polisher, Numoto's latest patent also includes a wafer polishing apparatus that offers the ability to control the polishing pressure precisely. This apparatus is designed to maintain high-quality standards for wafers, featuring a holding head that consists of a carrier for pressing the wafer against a polishing pad, along with a retainer ring around the carrier. The holding head body hosts a carrier pressing device equipped with an air bag that has a pressing surface area of 50% or smaller than that of the wafer, effectively transmitting the required pressing force.
Career Highlights
Minoru Numoto's career at Tokyo Seimitsu Co., Ltd. has been marked by continuous innovation and development in the semiconductor equipment industry. His dedication to improving wafer polishing techniques has garnered recognition not only for him but also for the company, positioning it at the forefront of technological advancement in this field.
Collaborations
Throughout his career, Numoto has had the opportunity to work alongside esteemed coworkers such as Takao Inaba and Kenji Sakai. Collaborating with such talented individuals has allowed for a rich exchange of ideas and innovations, further enhancing the quality of the technologies developed at Tokyo Seimitsu.
Conclusion
Minoru Numoto stands out as a brilliant inventor in the realm of wafer polishing technologies. His patents and innovations play a crucial role in maintaining the quality and efficiency of semiconductor manufacturing. As he continues to push the boundaries of innovation, the industry looks forward to his future contributions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile