The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2006
Filed:
Dec. 04, 2001
Applicant:
Minoru Numoto, Mitaka, JP;
Inventor:
Minoru Numoto, Mitaka, JP;
Assignee:
Tokyo Seimitsu Co., Ltd., Mitaka, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B24B 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wafer polisher, wherein a retainer ring () is installed in a wafer holding head (), a protective sheet material () is disposed inside the retainer ring (), and a wafer (W) is pressed against a polishing pad () through the protective sheet material () for polishing, whereby the protective sheet material () can be disposed without causing wrinkles on the inner peripheral part of the retainer ring ().